Raman analysis of trans-polyacetylene chains in hydrogenated amorphous carbon films

被引:17
|
作者
Oshiro, Takehiko [1 ]
Yamazato, Masaaki [1 ]
Higa, Akira [1 ]
Toguchi, Minoru [1 ]
机构
[1] Univ Ryukyus, Fac Engn, Nishihara, Okinawa 9030213, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 02期
关键词
hydrogenated amorphous carbon; Raman measurement; trans-polyacetylene; RF sputtering; bonding hydrogen concentration; optical gap; hardness;
D O I
10.1143/JJAP.46.756
中图分类号
O59 [应用物理学];
学科分类号
摘要
Hydrogenated amorphous carbon (a-C:H) films were deposited using a RF magnetron Sputtering system in H-2/He plasma. The bonding hydrogen concentration (n(H)), optical gap, hardness and Raman spectrum of these a-C:H films were measured. Two significant peaks centered at similar to 1150 and similar to 1450 cm(-1) were observed in the Raman spectra of the a-C:H films with a high n(H). The two Raman peaks are attributed to the vibration modes of trans-polyacetylene (trans-PA), and the similar to 1150 cm(-1) peak is used to analyze the trans-PA chaining configuration. As a result, it is found that as the n(H) increases, the relative intensity of this peak increases and its peak position downshifts. These results indicate that the trans-PA chain content and its conjugate length increase with n(H). In this paper, we show that the chaining configuration of the a-C:H films can be analyzed using the similar to 1150 cm(-1) peak in the Raman spectrum.
引用
收藏
页码:756 / 760
页数:5
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