Raman analysis of trans-polyacetylene chains in hydrogenated amorphous carbon films

被引:17
|
作者
Oshiro, Takehiko [1 ]
Yamazato, Masaaki [1 ]
Higa, Akira [1 ]
Toguchi, Minoru [1 ]
机构
[1] Univ Ryukyus, Fac Engn, Nishihara, Okinawa 9030213, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 02期
关键词
hydrogenated amorphous carbon; Raman measurement; trans-polyacetylene; RF sputtering; bonding hydrogen concentration; optical gap; hardness;
D O I
10.1143/JJAP.46.756
中图分类号
O59 [应用物理学];
学科分类号
摘要
Hydrogenated amorphous carbon (a-C:H) films were deposited using a RF magnetron Sputtering system in H-2/He plasma. The bonding hydrogen concentration (n(H)), optical gap, hardness and Raman spectrum of these a-C:H films were measured. Two significant peaks centered at similar to 1150 and similar to 1450 cm(-1) were observed in the Raman spectra of the a-C:H films with a high n(H). The two Raman peaks are attributed to the vibration modes of trans-polyacetylene (trans-PA), and the similar to 1150 cm(-1) peak is used to analyze the trans-PA chaining configuration. As a result, it is found that as the n(H) increases, the relative intensity of this peak increases and its peak position downshifts. These results indicate that the trans-PA chain content and its conjugate length increase with n(H). In this paper, we show that the chaining configuration of the a-C:H films can be analyzed using the similar to 1150 cm(-1) peak in the Raman spectrum.
引用
收藏
页码:756 / 760
页数:5
相关论文
共 50 条
  • [31] Correlation of acetylene plasma discharge environment and the optical and electronic properties of the hydrogenated amorphous carbon films
    Aldeeb, Mustafa A.
    Morgan, Nasser
    Abouelsayed, A.
    Amin, Khaled M.
    Hassaballa, Safwat
    DIAMOND AND RELATED MATERIALS, 2019, 96 : 74 - 84
  • [32] Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
    Choi, Taejin
    Yeo, Seungmin
    Song, Jeong-Gyu
    Seo, Seunggi
    Jang, Byeonghyeon
    Kim, Soo-Hyun
    Kim, Hyungjun
    SURFACE & COATINGS TECHNOLOGY, 2018, 344 : 12 - 20
  • [33] INVESTIGATION ON THE MICROSTRUCTURE OF HYDROGENATED AMORPHOUS-CARBON FILMS BY ELECTRON ENERGY-LOSS SPECTROSCOPY
    YAMAZAKI, H
    KATASHIMA, M
    BEKKU, I
    MIHARA, M
    OKUYAMA, N
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (11): : L2108 - L2110
  • [34] Hydrogenated amorphous carbon films deposited using plasma enhanced chemical vapor deposition processes
    Li, Jie
    Chae, Heeyeop
    KOREAN JOURNAL OF CHEMICAL ENGINEERING, 2023, 40 (06) : 1268 - 1276
  • [35] Hard-hydrogenated tetrahedral amorphous carbon films by distributed electron cyclotron resonance plasma
    Piazza, F
    INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2006, 24 (1-2): : 39 - 48
  • [36] Hydrogenated amorphous carbon films deposited using plasma enhanced chemical vapor deposition processes
    Jie Li
    Heeyeop Chae
    Korean Journal of Chemical Engineering, 2023, 40 : 1268 - 1276
  • [37] Near-surface mechanical properties and surface morphology of hydrogenated amorphous carbon thin films
    Kassavetis, S. N.
    Logothetidis, S.
    Matenoglou, G. M.
    SURFACE & COATINGS TECHNOLOGY, 2006, 200 (22-23): : 6400 - 6404
  • [38] Tribochemistry of hydrogenated amorphous carbon through analysis of Mechanically Stimulated Gas Emission
    Rusanov, Anton
    Nevshupa, Roman
    Martin, Jean-Michel
    Garrido, Miguel Angel
    Roman, Elisa
    DIAMOND AND RELATED MATERIALS, 2015, 55 : 32 - 40
  • [39] Substrate tilting effect on structure of tetrahedral amorphous carbon films by Raman spectroscopy
    Liu, Fan-Xin
    Yao, Kai-Lun
    Liu, Zu-Li
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (16-17): : 7235 - 7240
  • [40] Effects of carbon nanoparticle insertion on stress reduction in hydrogenated amorphous carbon films using plasma chemical vapor deposition
    Ono, Shinjiro
    Hwang, Sung-Hwa
    Okumura, Takamasa
    Yamashita, Naoto
    Kamataki, Kunihiro
    Kiyama, Haruki
    Itagaki, Naho
    Koga, Kazunori
    Shiratani, Masaharu
    DIAMOND AND RELATED MATERIALS, 2024, 150