共 12 条
- [1] BROCKLEHURST JE, 1981, CHEM PHYS CARBON, V17, P175
- [4] IKEDA T, 1991, THIN SOLID FILMS, V195, P99, DOI 10.1016/0040-6090(91)90262-V
- [5] Microhardness and lattice parameter of Cr1-xAlxN films [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (02): : 569 - 571
- [8] THE STRUCTURE AND COMPOSITION OF TI-ZR-N, TI-AL-ZR-N AND TI-AL-V-N COATINGS [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1988, 106 : 481 - 488
- [10] DEPOSITION AND CHARACTERIZATION OF TERNARY NITRIDES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 2136 - 2139