Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films

被引:112
作者
Kimura, A [1 ]
Kawate, M [1 ]
Hasegawa, H [1 ]
Suzuki, T [1 ]
机构
[1] Keio Univ, Ctr Mat Sci, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan
关键词
phase transitions; lattice parameters; aluminum nitride; anisotropy;
D O I
10.1016/S0257-8972(03)00040-9
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Ti1-xAlxN and Cr1-xAlxN films were synthesized by the arc ion plating method differing in the second metal contents X and investigated on their crystal structures, lattice parameters and microstructures. X-ray diffraction patterns showed that crystal structures of both Ti1-xAlxN and Cr1-x AlxN films changed from the NaCl-type (cubic structure; c-) to wurtzite-type (hexagonal structure: h-) at Al contents X = 0.6-0.7. Lattice parameters of c-Ti1-xAlxN and c-Cr1-xAlxN with Al contents X less than or equal to 0.6 uniformly decreased with respect to all lattice spacings with increasing X values. On the other hand, for h-Ti1-xAlxN and h-Cr1-xAlxN films with X greater than or equal to 0.7. anisotropic lattice expansion and shrinkage were observed with the a- and c-axes. The lattice spacing expanded in the a-direction and shrank in the c-direction by adding Ti and Cr atoms with larger atomic radius into AlN structure, respectively. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:367 / 370
页数:4
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