Characterisation of a low-voltage actuated gold microswitch

被引：14

作者：

Attia, P ^{[1
]}

Tremblay, G ^{[1
]}

Laval, R ^{[1
]}

Hesto, P ^{[1
]}

机构：

[1] Univ Paris 11, Inst Elect Fondamentale, URA 022, F-91405 Orsay, France

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1998年 / 51卷 / 1-3期

关键词：

microsystems technology; mechanical characterisation; gold microswitch; low-voltage actuation;

D O I：

10.1016/S0921-5107(97)00281-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Gold microstructures were fabricated and electrostatically driven to demonstrate the feasibility of a low-voltage actuated microswitch. The structures, composed of a deflectable cantilever microbeam, two lateral driving electrodes and a working part, are manufactured using a micrormachining technique with a single mask. Both static and dynamic behaviours of the device are presented. Young's modulus and the ageing of the structures are also estimated. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：263 / 266

页数：4

共 7 条

[1] DISTORTION IN OFF-STATE ARSENIDE MESFET SWITCHES [J].

CAVERLY, RH .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1993, 41 (08) :1323-1328

[2]

DRAKE J, 1995, 8 INT C SOL STAT SEN, V9

[3]

LANDAU L, THEORIE ELASTICITE, P151

[4] DYNAMIC MICROMECHANICS ON SILICON - TECHNIQUES AND DEVICES [J].

PETERSEN, KE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) :1241-1250

[5]

TREMBLAY G, 1996, 3 C FRANC MEC BES FR, V2, P487

[6] MECHANICAL DEFLECTION OF CANTILEVER MICROBEAMS - A NEW TECHNIQUE FOR TESTING THE MECHANICAL-PROPERTIES OF THIN-FILMS [J].

WEIHS, TP ;

HONG, S ;

BRAVMAN, JC ;

NIX, WD .

JOURNAL OF MATERIALS RESEARCH, 1988, 3 (05) :931-942

[7]

YAO J, 1995, 8 INT C SOL STAT SEN

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