Long-Term Characterization of a New Wide-Angle Micromirror With PZT Actuation and PZR Sensing

被引：20

作者：

Frigerio, Paolo ^{[1
]}

Di Diodoro, Bianca ^{[1
]}

Rho, Valeria ^{[2
]}

Carminati, Roberto ^{[2
]}

Boni, Nicolo ^{[2
]}

Langfelder, Giacomo ^{[1
]}

机构：

[1] Politecn Milan, Dipartimento Elettron Informaz & Bioingn, Milan, Italy

[2] STMicroelectronics, Analog & MEMS Grp, I-20010 Cornaredo, Italy

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2021年 / 30卷 / 02期

关键词：

Stress; Fatigue; Springs; Micromechanical devices; Sensors; Micromirrors; Silicon; MEMS; piezoelectric actuation; fatigue;

D O I：

10.1109/JMEMS.2021.3052448

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work presents a long-term characterization of a newly designed microelectromechanical-system (MEMS) micromirror capable of achieving a field-of-view (FOV) of almost 94 degrees. The process used to fabricate the device allows to combine piezoelectric (PZT) actuation and piezoresistive (PZR) sensing of the tilt angle, enabling testing under closed loop control. Consistently with the adopted design guidelines, which considered fatigue limits on the silicon springs, the tested devices are able to withstand up to 3.6 billion continuous operating cycles in an uncontrolled laboratory environment when operated in resonant mode at 500 Hz. [2020-0366]

引用

页码：281 / 289

页数：9

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