Fabrication of chalcogenide glass waveguide for IR evanescent wave sensors

被引：2

作者：

Ganjoo, A ^{[1
]}

Jain, H ^{[1
]}

Ryan, JV ^{[1
]}

Song, R ^{[1
]}

Chanda, R ^{[1
]}

Irudayaraj, J ^{[1
]}

Ding, YJ ^{[1
]}

Pantano, CG ^{[1
]}

机构：

[1] Lehigh Univ, Ctr Opt Technol, Bethlehem, PA 18015 USA

来源：

NANOSENSING: MATERIALS AND DEVICES | 2004年 / 5593卷

关键词：

chalcogenide glasses; waveguide; evanescent wave; bio sensor; photoinduced structural changes; laser writing;

D O I：

10.1117/12.573900

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Thin film multi-layered chalcogenide glass waveguide structures have been fabricated for evanescent wave sensing of bio toxins and other applications. Thin films of Ge containing chalcogenides have been deposited onto Si substrates, with a-GeSe2 as the cladding layer and a-GeSbSe as the core layer to form the slab waveguide. Channel waveguides have been written in the slab waveguides by appropriate light the through a mask. The photo-induced structural changes in the core layer selectively enhance refractive index at the portions of interest and thus confining the light to the channels. The waveguides have been characterized and tested for the guiding of light.

引用

页码：637 / 642

页数：6

共 11 条

[1] Diagnostics of breast cancer tissues by fiber optic evanescent wave Fourier transform IR (FEW-FTIR) spectroscopy [J].