A study on the properties of C-doped Ge8Sb2Te11 thin films during an amorphous-to-crystalline phase transition

被引:3
作者
Park, Cheol-Jin [1 ]
Kong, Heon [1 ]
Lee, Hyun-Yong [1 ]
Yeo, Jong-Bin [2 ]
机构
[1] Chonnam Natl Univ, Dept Adv Chem & Engn, Gwangju 61186, South Korea
[2] Chonnam Natl Univ, Res Inst Catalysis, Gwangju 61186, South Korea
基金
新加坡国家研究基金会;
关键词
Chalcogenide; PRAM; Ge8Sb2Te11; Carbon; Sputter; GE2SB2TE5;
D O I
10.3938/jkps.68.859
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
In this work, we evaluated the structural, electrical and optical properties of carbon-doped Ge8Sb2Te11 thin films. In a previous work, GeSbTe alloys were doped with different materials in an attempt to improve the thermal stability. Ge8Sb2Te11 and carbon-doped Ge8Sb2Te11 films of 250 nm in thickness were deposited on p-type Si (100) and glass substrates by using a RF magnetron reactive co-sputtering system at room temperature. The fabricated films were annealed in a furnance in the 0 similar to 400A degrees C temperature range. The structural properties were analyzed by using X-ray diffraction (XRD), and the result showed that the carbon-doped Ge8Sb2Te11 had a face-centeredcubic (fcc) crystalline structure and an increased crystallization temperature (T (c) ). An increase in the T (c) leads to thermal stability in the amorphous state. The optical properties were analyzed by using an UV-Vis-IR spectrophotometer, and the result showed an increase in the optical-energy band gap (E (op) ) in the crystalline materials and an increase in the E (op) difference (Delta E (op) ), which is a good effect for reducing the noise in the memory device. The electrical properties were analyzed by using a 4-point probe, which showed an increase in the sheet resistance (R (s) ) in the amorphous state and the crystalline state, which means a reduced programming current in the memory device.
引用
收藏
页码:859 / 863
页数:5
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