Silicon Carbide (SiC) Nanoelectromechanical Antifuse for Ultralow-Power One-Time-Programmable (OTP) FPGA Interconnects

We report a new nanoscale antifuse featuring low-power and high-programming speed, by employing silicon carbide (SiC) nanoelectromechanical systems (NEMS). We show that the SiC NEMS antifuses can enable ultralow-power one-time-programmable (OTP) field-programmable gate arrays (FPGAs) with characteristics promising for security-sensitive and harsh-environment applications. The SiC NEMS antifuses offer minimal leakage, low-programming voltage (down to similar to 1.5 V), ideally abrupt transient, high on/off ratios (>10(7)) and high-current carrying ability (>10(6) A/cm(2)), and very small footprints (similar to 1 mu m(2) to similar to 0.1 mu m(2) per device). We further describe new designs of antifuses, simulate FPGA benchmarking circuits based on experimentally demonstrated practical NEMS antifuses, and compare their advantageous performance with state-of-the-art conventional antifuse FPGAs. We also demonstrate a SiC NEMS antifuse-based OTP memory cell with a read margin of > 10(6).