Fabrication of 3D microstructures with inclined/rotated UV lithography

被引：0
|
作者：
Han, M [1 ]
Lee, W [1 ]
Lee, SK [1 ]
Lee, SS [1 ]
机构：
[1] Pohang Univ Sci & Technol, Dept Mech Engn, Nam Gu, Pohang 790784, Kyungbuk, South Korea
来源：
MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS | 2003年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a novel microfabrication technology of three-dimensional (3D) microstructures with inclined/rotated UV lithography. Various 3D microstructures have been made of negative thick photoresist, SU-8, using single inclined, double inclined, or inclined & rotated UV lithography. In some cases, we also exploit the UV reflected by the substrate as well as the incident UV from the source to form various microstructures. With the 3D microfabrication technology, various 3D microstructures are simply and easily fabricated such as oblique cylinders, embedded channels, bridges, V-grooves, truncated cones, and so on.
引用
收藏
页码：554 / 557
页数：4
相关论文
共 50 条
  • [11] Hybrid UV Lithography for 3D High-Aspect-Ratio Microstructures
    Park, Sungmin
    Nam, Gyungmok
    Kim, Jonghun
    Yoon, Sang-Hee
    TRANSACTIONS OF THE KOREAN SOCIETY OF MECHANICAL ENGINEERS A, 2016, 40 (08) : 731 - 736
  • [12] Multidirectional UV lithography via inclined/rotated mirrors for liquid materials
    Sugimito, Takumi
    Takahashi, Hidetoshi
    APPLIED PHYSICS EXPRESS, 2020, 13 (07)
  • [13] Inclined nanoimprinting lithography for 3D nanopatterning
    Liu, Zhan
    Bucknall, David G.
    Allen, Mark G.
    NANOTECHNOLOGY, 2011, 22 (22)
  • [14] A novel fabrication technology for smooth 3D inclined polymer microstructures with adjustable angles
    Hung, KY
    Hu, HT
    Tseng, FG
    BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 821 - 824
  • [15] Fabrication of 3D nanostructures by multidirectional UV lithography and predictive structural modeling
    Kim, Jungkwun
    Kim, Cheolbok
    Allen, Mark G.
    Yoon, Yong-Kyu Y. K.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2015, 25 (02)
  • [16] Overcoming delamination in two-photon lithography for improving fabrication of 3D microstructures
    Ha, Cheol Woo
    MICRO AND NANO SYSTEMS LETTERS, 2023, 11 (01)
  • [17] Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies
    Chen, KS
    Lin, IK
    Ko, FH
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (10) : 1894 - 1903
  • [18] Overcoming delamination in two-photon lithography for improving fabrication of 3D microstructures
    Cheol Woo Ha
    Micro and Nano Systems Letters, 11
  • [19] SU-8 3D microoptic components fabricated by inclined UV lithography in water
    Z. Ling
    K. Lian
    Microsystem Technologies, 2007, 13 : 245 - 251
  • [20] SU-8 3D microoptic components fabricated by inclined UV lithography in water
    Ling, Z.
    Lian, K.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2007, 13 (3-4): : 245 - 251
12345