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- [24] From CD to 3D - Sidewall roughness analysis with 3D CD-AFM Metrology, Inspection, and Process Control for Microlithography XIX, Pts 1-3, 2005, 5752 : 966 - 976
- [28] Correlation of 2D and 3D particle properties with simulated particle imaging dataset PARTICUOLOGY, 2025, 96 : 152 - 170