Tubular Micro- and Nano- Sensors and Actuators for Aerodynamics

被引：0

作者：

Seleznev, Vladimir A. ^{[1
]}

Prinz, Victor Ya. ^{[1
]}

Aniskin, Vladimir A. ^{[2
]}

Shiplyuk, Alexander N. ^{[2
]}

机构：

[1] RAS, SD, Inst Semicond Phys, Novosibirsk, Russia

[2] RAS, SD, Inst Theoret & Appl Mech, Novosibirsk, Russia

来源：

2009 INTERNATIONAL SCHOOL AND SEMINAR ON MODERN PROBLEMS OF NANOELECTRONICS, MICRO- AND NANOSYSTEM TECHNOLOGIES | 2009年

关键词：

Heterofilm; microtube; nanotube; hot-wire anemometer; MICROHEATERS; DISTURBANCES; REGISTRATION; MICROSENSORS; GENERATION; NANOTUBES; ARRAYS;

D O I：

10.1109/INTERNANO.2009.5335627

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

New data on the fabrication and study of semiconductor micro- and nanotubes, and also on the application of such micro- and nanotubes as basic elements in sensors and actuators are reported. Fabrication methods for tubular micro- and nanosensors and actuators are described, and examples of fabricated devices arc presented. The potential offered by the fabricated pilot devices in aerodynamic applications is demonstrated.

引用

页码：74 / +

页数：2

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