B ion implantation effects on L10 chemical ordering of FePt thin films

被引：17

作者：

Aoyama, T

Sato, I

Ito, H

Ishio, S

机构：

[1] TDK Corp, Nagano 3850009, Japan

[2] Akita Univ, Akita 0108502, Japan

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2005年 / 287卷

关键词：

ion implantation; FePt; L1(0); chemical ordering;

D O I：

10.1016/j.jmmm.2004.10.033

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

B ion implantation effects on L1(0) chemical ordering of FePt thin films are investigated. Using ion implantation equipment, B+ ions were implanted into the as-deposited disordered FePt thin films followed by a rapid thermal annealing (RTA). Magnetic properties, surface roughness and crystalline structures of the samples were examined before and after RTA. It was found that by B+ ion implantation, FePt thin films showed larger coercivity and smoother surface after RTA. X-ray diffraction measurements have revealed that the lattice parameters were changed by B+ ion implantation. The B+ ion implanted sample showed elongated a-axis and lower cla ratio after RTA. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：209 / 213

页数：5

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