Ellipsometric and XPS study of the initial oxidation of zirconium at room temperature

被引：15

作者：

Lyapin, A ^{[1
]}

Jeurgens, LPH ^{[1
]}

Graat, PCJ ^{[1
]}

Mittemeijer, EJ ^{[1
]}

机构：

[1] Max Planck Inst Met Res, D-70569 Stuttgart, Germany

来源：

SURFACE AND INTERFACE ANALYSIS | 2004年 / 36卷 / 08期

关键词：

oxidation; zirconium; zirconium oxide; constitution; composition; growth kinetics;

D O I：

10.1002/sia.1819

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The initial oxidation of polycrystalline zirconium has been investigated with XPS and in situ spectroscopic ellipsometry. Oxidations were performed at room temperature at partial oxygen pressures (pO(2)) of 1.3 x 10(-7),1.3 x 10(-6) and 1.3 x 10(-5) Pa. Analysis of the measured Zr 3d XPS spectra revealed the presence of a Zr-enrichment in the oxide contiguous to the metal/oxide interface, as well as at the oxide surface. Investigation of the oxide-film growth kinetics at various values of pO(2), as determined from both the XPS and the ellipsometry measurements, showed the occurrence of an initial regime of very fast, electric-field controlled growth, followed by a much slower oxidation stage, ending up with a non-stoichiometric oxide film of 'limiting' thickness. Copyright (C) 2004 John Wiley Sons, Ltd.

引用

页码：989 / 992

页数：4

共 15 条

[1] Amperometric glucose sensor based on glucose oxidase immobilized in electrochemically generated poly(ethacridine) [J].