Ozone passivation technique for corrosive gas distribution system

被引：9

作者：

Koike, K ^{[1
]}

Inoue, G ^{[1
]}

Takata, T ^{[1
]}

Fukuda, T ^{[1
]}

机构：

[1] Iwatani Int Corp, Shiga Technol Ctr, Shiga 524, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 12A期

关键词：

passivated film; ozone oxidation; corrosion resistance; stainless steel; pitting potential;

D O I：

10.1143/JJAP.36.7437

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A passivation technique using highly concentrated ozone has been developed for electropolished stainless steel tubings that supply corrosive gases. The strong oxidizing ability of ozone enables the inner surface to form an anticorrosive passivation film with thickness up to 60 Angstrom under room temperature and atmospheric pressure conditions. The ozone passivation film has excellent resistance to pitting corrosion. An improvement of corrosion resistance of the ozone-passivated surface was proven by the evaluation of the concentration of dissolved metals and particle generation after exposure to ClF3. Moreover, we discuss the mechanism of ozone passivation reaction on the stainless steel surface.

引用

页码：7437 / 7441

页数：5

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