Graded index broadband antireflection coating prepared by glancing angle deposition for a high-power laser system

被引：18

作者：

Kong Wei-Jin ^{[1
]}

Shen Zi-Cai ^{[2
]}

Wang Shu-Hua ^{[1
]}

Shao Jian-Da ^{[3
]}

Fan Zheng-Xiu ^{[3
]}

Lu Chao-Jing ^{[1
]}

机构：

[1] Qingdao Univ, Coll Phys Sci, Qingdao 266071, Peoples R China

[2] Beijing Inst Spacecraft Environm Engn, Beijing 100094, Peoples R China

[3] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

来源：

CHINESE PHYSICS B | 2010年 / 19卷 / 04期

基金：

中国国家自然科学基金;

关键词：

broadband antireflection coating; graded index; glancing angle deposition; THIN-FILMS;

D O I：

10.1088/1674-1056/19/4/044210

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

This paper reports that SiO2 is selected to fabricate broadband antireflection (AR) coatings on fused silica substrate by using glancing angle deposition and physical vapour deposition. Through accurate control of the graded index of the SiO2 layer, transmittance of the graded broadband AR coating can achieve an average value of 98% across a spectral range of 300-1850 nm. Moreover, a laser-induced damage threshold measurement of the fabricated AR coating is performed by using a one-on-one protocol according to ISO11254-1, resulting in an average damage threshold of 17.2 J/cm(2).

引用

页数：5

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