Null ellipsometer with phase modulation

被引：22
作者：
Postava, K
Maziewski, A
Yamaguchi, T
Ossikovski, R
Visnovsky, S
Pistora, J
机构：
[1] Univ Bialystok, Inst Expt Phys, Magnetism Lab, PL-15424 Bialystok, Poland
[2] Tech Univ Ostrava, Dept Phys, Ostrava 70833, Czech Republic
[3] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 4328011, Japan
[4] Ecole Polytech, Phys Interfaces & Couches Minces Lab, F-91128 Palaiseau, France
来源：
OPTICS EXPRESS | 2004年 / 12卷 / 24期
关键词：
D O I：
10.1364/OPEX.12.006040
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A new null ellipsometer is described that uses photoelastic modulator (PEM). The phase modulation adds a good signal-to-noise ratio, high sensitivity, and linearity near null positions to the traditional high-precision nulling system. The ellipsometric angles Delta and psi are obtained by azimuth measurement of the analyzer and the polarizer - PEM system, for which the first and second harmonics of modulator frequency cross the zeros. We show that the null system is insensitive to ellipsometer misadjustment and component imperfections and modulator calibration is not needed. In addition, a fast ellipsometer mode for fine changes measurement of ellipsometric angles is proposed. (C) 2004 Optical Society of America.
引用
收藏
页码：6040 / 6045
页数：6
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