Cubic Aluminum Nitride Coating Through Atmospheric Reactive Plasma Nitriding

Aluminum nitride is a promising material for structural and functional applications. Cubic AlN (c-AlN) is expected to have higher thermal conductivity due to their high symmetry; however, its fabrication is difficult. In this study, c-AlN was synthesized by atmospheric plasma spray process through the reaction between Al feedstock powder and nitrogen plasma. Al powders were supplied to the plasma stream by Ar carrier gas and reacted with surrounding N-2 plasma, then deposit onto substrate. The obtained coatings were c-AlN/Al mixture at 150 mm of spray distance, and the nitride content was improved by increasing the spray distance. The coatings almost consist of c-AlN at 300 mm of spray distance. The coatings thickness decreased from 100 to 10 mu m with increasing spray distance from 150 to 300 mm. Using carrier gas, N-2 enable to fabricate thick c-AlN coating with hardness 1020 Hv.