Transparent megahertz circuits from solution-processed composite thin films

被引:4
作者
Liu, Xingqiang [1 ,2 ]
Wan, Da [1 ,2 ]
Wu, Yun [3 ]
Xiao, Xiangheng [1 ,2 ]
Guo, Shishang [1 ,2 ]
Jiang, Changzhong [1 ,2 ]
Li, Jinchai [1 ,2 ]
Chen, Tangsheng [3 ]
Duan, Xiangfeng [4 ]
Fan, Zhiyong [5 ]
Liao, Lei [1 ,2 ]
机构
[1] Wuhan Univ, Minist Educ, Dept Phys, Wuhan 430072, Peoples R China
[2] Wuhan Univ, Minist Educ, Key Lab Artificial Micro & Nanostruct, Wuhan 430072, Peoples R China
[3] Nanjing Elect Device Inst, Sci & Technol Monolith Integrated Circuits & Mol, Nanjing 210016, Jiangsu, Peoples R China
[4] Univ Calif Los Angeles, Dept Chem & Biochem, Los Angeles, CA 90095 USA
[5] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Hong Kong, Peoples R China
关键词
LOW-TEMPERATURE; SEMICONDUCTOR NANOWIRES; AMORPHOUS-SILICON; CARBON NANOTUBES; HIGH-MOBILITY; SOL-GEL; TRANSISTORS; FABRICATION; ELECTRONICS; INTEGRATION;
D O I
10.1039/c6nr00602g
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Solution-processed amorphous oxide semiconductors have attracted considerable interest in large-area transparent electronics. However, due to its relative low carrier mobility (similar to 10 cm(2) V-1 s(-1)), the demonstrated circuit performance has been limited to 800 kHz or less. Herein, we report solution-processed high-speed thin-film transistors (TFTs) and integrated circuits with an operation frequency beyond the megahertz region on 4 inch glass. The TFTs can be fabricated from an amorphous indium gallium zinc oxide/single-walled carbon nanotube (a-IGZO/SWNT) composite thin film with high yield and high carrier mobility of > 70 cm(2) V-1 s(-1). On-chip microwave measurements demonstrate that these TFTs can deliver an unprecedented operation frequency in solution-processed semiconductors, including an extrinsic cutoff frequency (f(T) = 102 MHz) and a maximum oscillation frequency (f(max) = 122 MHz). Ring oscillators further demonstrated an oscillation frequency of 4.13 MHz, for the first time, realizing megahertz circuit operation from solution-processed semiconductors. Our studies represent an important step toward high-speed solution-processed thin film electronics.
引用
收藏
页码:7978 / 7983
页数:6
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