Effects during plasma nitriding of shaped materials of different sizes

被引:14
作者
de Ataíde, ARP
Alves, C
Leite, JP
机构
[1] Univ Fed Rio Grande Norte, Dept Fis, BR-59072970 Natal, RN, Brazil
[2] UFPB, Dept Engn Mech, BR-58109970 Campina Grande, PB, Brazil
关键词
plasma nitriding; non-uniformity problems; electric field distribution; energy balance;
D O I
10.1016/S0257-8972(02)00887-3
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Plasma nitriding of shaped materials and materials of different sizes may yield non-uniform nitrided layers and/or reproducibility problems limiting its industrial-scale use to specific cases. The energy balance at the substrate surface and several non-uniformity effects related to geometry, size and sample position in the chamber during plasma nitriding are discussed. To investigate several of these effects, rods of SAE 1020 steel, of 8 mm in diameter, with different heights (1, 3, 5, 8 and 10 mm) were plasma nitrided in a mixture of N-2-H-2 (20%) at different temperatures (673, 773 and 843 K) and pressures (200 and 500 Pa). The samples were characterized by optical and electron microscopy, X-ray diffraction and microhardness testing. Hardness increases from the center to the edge of the samples. In the case of samples nitrided at 500 Pa, a macroscopically visible ring is obtained with low hardness inside the ring. The diameter of the ring increases for taller samples. The various formed phases, the thickness of nitrided layer and the microhardness of the samples are directly related to the height of the rod. This is associated with surface energy balance. The results show that the top surface temperature increases with height. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:52 / 58
页数:7
相关论文
共 12 条
[1]   Effect of workpiece geometry on the uniformity of nitrided layers [J].
Alves, C ;
da Silva, EF ;
Martinelli, AE .
SURFACE & COATINGS TECHNOLOGY, 2001, 139 (01) :1-5
[2]   ION ENERGIES AT CATHODE OF A GLOW DISCHARGE [J].
DAVIS, WD ;
VANDERSLICE, TA .
PHYSICAL REVIEW, 1963, 131 (01) :219-&
[3]   Overheating of plasma-nitrided workpieces with cylindrical blind holes [J].
DeSousa, RS ;
Alves, C .
JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 1997, 6 (03) :300-302
[4]   PLASMA NITRIDING IN INDUSTRY - PROBLEMS, NEW SOLUTIONS AND LIMITS [J].
GRUN, R ;
GUNTHER, HJ .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1991, 140 :435-441
[5]   PLASMA-MATERIAL INTERACTIONS [J].
HESS, DW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03) :1677-1684
[6]  
INAL OT, 1989, P ASMS 2 INT C ION N, P57
[7]   INVITED REVIEW - CARBIDES AND NITRIDES IN STEEL [J].
JACK, DH ;
JACK, KH .
MATERIALS SCIENCE AND ENGINEERING, 1973, 11 (01) :1-27
[8]  
JACKSON JD, 1975, CLASSICAL ELECTRODYN, P76
[9]   The energy balance at substrate surfaces during plasma processing [J].
Kersten, H ;
Deutsch, H ;
Steffen, H ;
Kroesen, GMW ;
Hippler, R .
VACUUM, 2001, 63 (03) :385-431
[10]   The hollow cathode: a high-performance tool for plasma-activated deposition [J].
Morgner, H ;
Neumann, M ;
Straach, S ;
Krug, M .
SURFACE & COATINGS TECHNOLOGY, 1998, 108 (1-3) :513-519