Deposition of fluorocarbon polymer films in plasma excited by DC discharge and UV radiation

被引：0

作者：

Lungu, CP ^{[1
]}

Lungu, AM ^{[1
]}

Sakai, Y ^{[1
]}

Sugawara, H ^{[1
]}

Tabata, M ^{[1
]}

机构：

[1] Hokkaido Univ, Grad Sch Engn, Div Elect & Informat Engn, Sapporo, Hokkaido 0608628, Japan

来源：

INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS | 1999年

关键词：

D O I：

暂无

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

引用

页码：43 / 44

页数：2

共 7 条

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