Piezoelectric LiNbO3 and LiTaO3 films for SAW device applications.

被引：0
|
作者：
Shibata, Y
Kuze, N
Kaya, K
Matsui, M
Kanai, M
Kawai, T
机构：
来源：
1996 IEEE ULTRASONICS SYMPOSIUM, PROCEEDINGS, VOLS 1 AND 2 | 1996年
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D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Estremely high quality films of LiNbO3 and LiTaO3 are deposited on sapphire and LiTaO3 substrates using Ar-F excimer laser ablation. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. SAW velocity: electromechanical coupling coefficients and frequency response are calculated Experimental data of SAW properties coincide with calculated data.
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页码：247 / 254
页数：8
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