Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based On Michelson Interferometer Structure

In this paper, we design a monolithic integrated micro-opto-electromechanical system(MOEMS) accelerometer based on the Michelson interferometer structure. The accelerometer realizes the on-chip integration of the mode spot converter, the sensing optical path, the phase modulator and the photonic crystal reflector, and it senses the external acceleration through a "three-beam" structure which is composed of a central support beam and two tiny beams. The push-pull structure eliminates the coupling crosstalk caused by paraxial acceleration. Accurate results are demonstrated as follows: an accelerometer mechanical sensitivity of 3.638 nm/g, with a resonance frequency of 1742.2 Hz and a linear measurement range of +/- 500 g, corresponding to a foot print of the core part with 960 mu mx600 mu m. With its high precision, large measurement range, and small size, the proposed accelerometer may pave the way for the applications in civil, industrial and military fields.