Interfacial Energy-Dispersive Spectroscopy Profile X-Ray Resolution Measurements in Variable Pressure SEM

被引：1

作者：

Zoukel, Abdelhalim ^{[1
,2
]}

Khouchaf, Lahcen ^{[1
]}

Di Martino, Jean ^{[2
]}

Ruch, David ^{[2
]}

机构：

[1] Univ Lille Nord France, Ecole Mines Douai, F-59500 Douai, France

[2] Ctr Rech Publ Henri Tudor, Dept Adv Mat & Struct, L-4940 Luxembourg, Luxembourg

来源：

MICROSCOPY AND MICROANALYSIS | 2014年 / 20卷 / 05期

关键词：

variable pressure scanning electron microscope; spatial resolution; interface; EDS profile; X-ray microanalysis; interfacial distance; SCANNING-ELECTRON-MICROSCOPE; ENVIRONMENTAL SEM; SPATIAL-RESOLUTION; MICROANALYSIS; GAS; SCATTERING; MODEL; ESEM; AMPLIFICATION; IONIZATION;

D O I：

10.1017/S1431927614001676

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A procedure has been developed to follow degradation of energy-dispersive spectroscopy (EDS) X-ray lateral resolution in a variable pressure scanning electron microscope. This procedure is based on evaluation of the EDS profile shape change for different experimental conditions. Some parameters affecting the X-ray resolution in high-vacuum mode have been taken into account. Good agreement between the simulated and experimental EDS profiles shows the reliability of the proposed procedure. A significant improvement in measurement of the EDS profile interfacial distance (D-INT) has been achieved.

引用

页码：1565 / 1575

页数：11

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