Temperature effects of Si milling in NH3

被引：1

作者：

Li, ZL ^{[1
]}

Williams, JS

Calka, A

机构：

[1] Australian Natl Univ, Inst Adv Studies, Res Sch Phys Sci & Engn, Dept Elect Mat Engn, Canberra, ACT 0200, Australia

[2] Univ Wollongong, Dept Mat Engn, Wollongong, NSW 2522, Australia

来源：

MECHANICALLY ALLOYED, METASTABLE AND NANOCRYSTALLINE MATERIALS, PART 1 | 1998年 / 269-2卷

关键词：

ball milling; milling temperature; Fe contamination;

D O I：

10.4028/www.scientific.net/MSF.269-272.271

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

alpha-Si3N4 has been formed by ball milling of pure Si in NH3 and subsequently annealed in Ar. Milling was carried out at room temperature and 100 degrees C and the N content varies with milling temperature. For the case of milling at 100 degrees C, the complete formation of an amorphous SixNy phase was obtained after 48h milling, compared with 168h at room temperature. Both as-milled and annealed samples were investigated by X-ray diffraction, composition analysis, DTA and TGA. The results show that the crystallization temperature of a-Si3N4 decreases or increases in a complex way with increased milling time depending on milling temperature. The results are discussed in terms of competing adsorption/desorption and reaction processes during milling.

引用

页码：271 / 276

页数：6