Interfacial morphology evolution of a novel room-temperature ultrasonic bonding method based on nanocone arrays

被引:12
作者
Wang, Haozhe [1 ,2 ]
Ju, Longlong [1 ]
Guo, Yukun [1 ]
Mo, Xiu [1 ]
Ma, Shuo [1 ]
Hu, Anmin [1 ]
Lia, Ming [1 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, State Key Lab Met Matrix Composites, Shanghai 200240, Peoples R China
[2] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
基金
中国国家自然科学基金;
关键词
Ultrasonic bonding; Nanocone arrays; Voids; Interfacial morphology; WIRE;
D O I
10.1016/j.apsusc.2014.11.058
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The evolution of interfacial morphology is investigated in joints bonded by a newly developed ambient temperature ultrasonic bonding process based on Ni nano-cone arrays. This confirmed two types of void at the interface: a Type I void in the concave area among the cone-like nanocrystals, and a Type II void on the top of the cone-like nanocrystals. By increasing the bonding pressure or time, the Type I voids can be eliminated; however, a pressure threshold exists for the Type II voids, below which increasing the bonding time accelerates the formation of Type II voids. At pressures above this threshold, on the other hand, increasing the bonding time results in shrinkage of the Type II voids. Varying the pressure and time was also found to induce a change in the interfacial morphology from cone-like to ladder-like and finally a planar structure. In this way, the critical pressure for obtaining a solid bonding joint was found to be 7 MPa. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:849 / 853
页数:5
相关论文
共 28 条
[11]   Interface mechanism of ultrasonic flip chip bonding [J].
Li, J. ;
Han, L. ;
Duan, J. ;
Zhong, J. .
APPLIED PHYSICS LETTERS, 2007, 90 (24)
[12]   Theoretical and experimental analyses of atom diffusion characteristics on wire bonding interfaces [J].
Li, Junhui ;
Wang Fuliang ;
Han, Lei ;
Zhong, Jue .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2008, 41 (13)
[13]   Rapid formation of Cu/Cu3Sn/Cu joints using ultrasonic bonding process at ambient temperature [J].
Li, Mingyu ;
Li, Zhuolin ;
Xiao, Yong ;
Wang, Chunqing .
APPLIED PHYSICS LETTERS, 2013, 102 (09)
[14]  
Li Y, 2010, NANO-BIO-ELECTRONIC, PHOTONIC AND MEMS PACKAGING, P19, DOI 10.1007/978-1-4419-0040-1_2
[15]   Effects of ultrasonic bonding process on polymer-based anisotropic conductive film joints in chip-on-glass assemblies [J].
Lin, Y. C. ;
Jin, Hao ;
Fang, Xiao-Nan .
POLYMER TESTING, 2011, 30 (03) :318-323
[16]   Low-temperature solid state bonding method based on surface Cu-Ni alloying microcones [J].
Lu, Qin ;
Chen, Zhuo ;
Zhang, Wenjing ;
Hu, Anmin ;
Li, Ming .
APPLIED SURFACE SCIENCE, 2013, 268 :368-372
[17]   Footprint study of ultrasonic wedge-bonding with aluminum wire on copper substrate [J].
Lum, I ;
Mayer, M ;
Zhou, Y .
JOURNAL OF ELECTRONIC MATERIALS, 2006, 35 (03) :433-442
[18]   Anomalous microstructure formed at the interface between copper ribbon and tin-deposited copper plate by ultrasonic bonding [J].
Maeda, Masakatsu ;
Sato, Takaaki ;
Inoue, Naoto ;
Yagi, Daisuke ;
Takahashi, Yasuo .
MICROELECTRONICS RELIABILITY, 2011, 51 (01) :130-136
[19]  
Mimatsu H., 2012, CPMT S JAP, P1
[20]  
Miyoshi H., 2014, INT POW SYST CIPS 20, P1