Size effect in cluster collision on solid surfaces

被引：23

作者：

Matsuo, Jiro ^{[1
]}

Ninomiya, Satoshi ^{[1
]}

Nakata, Yoshihiko ^{[1
]}

Ichiki, Kazuya ^{[1
]}

Aoki, Takaaki ^{[1
]}

Seki, Toshio ^{[1
]}

机构：

[1] Kyoto Univ, Quantum Sci & Engn Ctr, Uji, Kyoto 6110011, Japan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2007年 / 257卷

关键词：

cluster; ion; SIMS; emission;

D O I：

10.1016/j.nimb.2007.01.164

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

New surface modification processes have been demonstrated using gas cluster ion irradiations. Multiple collision and high energy density collision of cluster ions are responsible for "non-linear phenomena", which play an important role in the surface modification process. Because of the unique interaction between cluster ions and surface atoms, atomistic mechanisms of cluster ion bombardment must be understood for the further developments of this technology. Cluster size is a unique parameter for cluster ions. One of the fundamental questions in this surface modification technique is the cluster size effect. It is important to use appropriate cluster size in each process. Size dependence of sputtering yields and secondary ion yields with large Ar cluster (N > 300) have been measured. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：627 / 631

页数：5

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