Micro-optomechanical infrared receiver with optical readout - MIRROR

被引：7

作者：

Norton, P ^{[1
]}

Mao, M ^{[1
]}

Perazzo, T ^{[1
]}

Zhao, Y ^{[1
]}

Kwon, O ^{[1
]}

Majumdar, A ^{[1
]}

Varesi, J ^{[1
]}

机构：

[1] IR Vis, Santa Barbara, CA 93105 USA

来源：

INFRARED DETECTORS AND FOCAL PLANE ARRAYS VI | 2000年 / 4028卷

关键词：

D O I：

10.1117/12.391720

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An uncooled infrared detector having an optical readout is described. infrared heat is sensed with bimaterial cantilevers which bend in response to temperature changes. One side of the bimaterial cantilever is an optical reflector. Visible light reflecting off the bent cantilever is detected with a CCD camera to provide the sensor output. We describe this device as a micro-optomechanical infrared receiver with optical readout-MIRROR. Devices based upon this principle have successfully imaged infrared. Changes to the system are in progress to improve sensitivity.

引用

页码：72 / 78

页数：7

共 4 条

[1] Kruse P. W., 1997, SEMICONDUCTORS SEMIM, V47, P17
[2] Direct-view uncooled micro-optomechanical infrared camera
Mao, M
Perazzo, T
Kwon, O
Majumdar, A
Varesi, J
Norton, P
[J]. MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 100 - 105
[3] Infrared vision using uncooled micro-optomechanical camera
Perazzo, T
Mao, M
Kwon, O
Majumdar, A
Varesi, JB
Norton, P
[J]. APPLIED PHYSICS LETTERS, 1999, 74 (23) : 3567 - 3569
[4] ZHAO Y, IN PRESS MICROSCALE

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