Improvement of electrical and optical properties of ZnO thin films prepared by MOCVD using UV light irradiation and in situ H2 post-treatment

被引：17

作者：

Myong, SY ^{[1
]}

Lim, KS ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Elect Engn & Comp Sci, Taejon 305701, South Korea

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2005年 / 86卷 / 01期

关键词：

ZnO; hydrogen post-treatment; MOCVD; photo-MOCVD; hydrogen incorporation;

D O I：

10.1016/j.solmat.2004.06.005

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

We have investigated the effect of ultraviolet (UV) light irradiation during the deposition of nominally undoped ZnO thin films using metalorganic chemical vapor deposition (MOCVD) and/or in situ hydrogen post-treatment. Due to the desorption of oxygen and incorporation of hydrogen as a shallow donor at the surface, the ZnO film prepared by the photo-MOCVD and in situ hydrogen post-treatment shows the highest film quality as a transparent conductive electrode for thin-film solar cells. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：105 / 112

页数：8

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