High-Performance Flexible Microneedle Array as a Low-Impedance Surface Biopotential Dry Electrode for Wearable Electrophysiological Recording and Polysomnography

被引:59
作者
Li, Junshi [1 ]
Ma, Yundong [2 ]
Huang, Dong [1 ,3 ,4 ]
Wang, Zhongyan [1 ]
Zhang, Zhitong [1 ]
Ren, Yingjie [1 ]
Hong, Mengyue [2 ]
Chen, Yufeng [1 ]
Li, Tingyu [1 ]
Shi, Xiaoyi [1 ]
Cao, Lu [1 ,5 ]
Zhang, Jiayan [1 ]
Jiao, Bingli [3 ]
Liu, Junhua [1 ]
Sun, Hongqiang [2 ]
Li, Zhihong [1 ]
机构
[1] Peking Univ, Sch Integrated Circuits, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
[2] Peking Univ, Natl Clin Res Ctr Mental Disorders, NHC Key Lab Mental Hlth, Inst Mental Hlth,Hosp 6, Beijing 100191, Peoples R China
[3] Peking Univ, Sch Elect, Beijing 100871, Peoples R China
[4] Hypnometry Microsyst, Beijing 100871, Peoples R China
[5] Peking Univ, Coll Engn, Beijing 100871, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
Flexible microneedle array; Dry electrode; Low-impedance electrode-skin contact; Wearable wireless electrophysiological recording; Polysomnography; MAGNETORHEOLOGICAL DRAWING LITHOGRAPHY; FABRICATION; PATCH;
D O I
10.1007/s40820-022-00870-0
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Microneedle array (MNA) electrodes are an effective solution to achieve high-quality surface biopotential recording without the coordination of conductive gel and are thus very suitable for long-term wearable applications. Existing schemes are limited by flexibility, biosafety, and manufacturing costs, which create large barriers for wider applications. Here, we present a novel flexible MNA electrode that can simultaneously achieve flexibility of the substrate to fit a curved body surface, robustness of microneedles to penetrate the skin without fracture, and a simplified process to allow mass production. The compatibility with wearable wireless systems and the short preparation time of the electrodes significantly improves the comfort and convenience of electrophysiological recording. The normalized electrode-skin contact impedance reaches 0.98 k omega cm(2) at 1 kHz and 1.50 k omega cm(2) at 10 Hz, a record low value compared to previous reports and approximately 1/250 of the standard electrodes. The morphology, biosafety, and electrical/mechanical properties are fully characterized, and wearable recordings with a high signal-to-noise ratio and low motion artifacts are realized. The first reported clinical study of microneedle electrodes for surface electrophysiological monitoring was conducted in tens of healthy and sleep-disordered subjects with 44 nights of recording (over 8 h per night), providing substantial evidence that the electrodes can be leveraged to substitute for clinical standard electrodes.
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页数:22
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