A1N on nanocrystalline diamond piezoelectric cantilevers for sensors/actuators

被引：10
|
作者：
Mortet, V. [1 ,2 ]
Soltani, A. [3 ]
Talbi, A. [4 ]
Pobedinskas, P. [1 ]
Haenen, K. [1 ,2 ]
De Jaeger, J-C. [3 ]
Pernod, P. [4 ]
Wagner, P. [1 ,2 ]
机构：
[1] Hassell Univ, IMO, Wetenschapspk 1, B-3590 Diepenbeek, Belgium
[2] IMEC vzw, Div IMOMEC, B-3590 Diepenbeek, Belgium
[3] Cite sci, CNRS 8520, IEMN, F-59651 Villeneuve, France
[4] Ecole Cent Lille, IEMN CNRS 8520, LEMA, Int Joint Lab, F-59652 Villeneuve Dascq, France
来源：
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期
关键词：
Nanocrystalline diamand NCD; Piezoelectric A1N; MEMS resonators;
D O I：
10.1016/j.proche.2009.07.010
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Micro-cantilevers can be used as both sensors and actuators. In this work, the design, fabrication and characterization of piezoelectrically driven nano-crystalline diamond (NCD) cantilevers are reported Diamond films were grown on silicon (100) substrates by microwave plasma enhanced chemical vapor deposition (MW-PECVD). Cantilevers are coated by DC pulsed piezoelectric with AIN films that is sandwiched between two metallic electrodes. The thicknesses of AIN and diamond layers are 1 mu m and 700nm, respectively. The influence on the electromechanical response of cantilevers length was studied. The motion of the electrically driven cantilevers is performed by measuring the evolution of the electrical impedance at the resonant frequencies that varies between 10 kHz and 130 kHz for the resonant mode.
引用
收藏
页码：40 / +
页数：2
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