Dielectric and thermal properties of AlN ceramics

被引:64
作者
Kume, Shoichi
Yasuoka, Masaki
Lee, Sang-Kee
Kan, Akinori
Ogawa, Hirotaka
Watari, Koji
机构
[1] Natl Inst Adv Ind Sci & Technol, Adv Mfg Res Inst, Moriyama Ku, Nagoya, Aichi 4638560, Japan
[2] Meijo Univ, Dept Transportat Engn, Tempaku Ku, Nagoya, Aichi 4688502, Japan
关键词
sintering; dielectric properties; nitrides; thermal conductivity;
D O I
10.1016/j.jeurceramsoc.2006.11.023
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The effects of slow-cooling and annealing conditions on dielectric loss, thermal conductivity and microstructure of AlN ceramics were investigated. Y2O3 from 0.5 to 1.25 mol% at 0.25% increments was added as a sintering additive to AlN powder and pressureless sintering was carried out at 1900 degrees C for 2 h in a nitrogen flowing atmosphere. To improve the properties, AlN samples were slow-cooled at a rate of 1 degrees C min(-1) from 1900 to 1750 degrees C, subsequently cooled to 970 degrees C at a rate of 10 degrees C min(-1) and then annealed at the same temperature for 4 h. AlN and YAG (5Al(2)O(3)/3Y(2)O(3)) were the only identified phases from XRD. AlN doped with 0.5 and 0.75 mol% Y2O3 had a low loss of < 2.0 x 10(-3) and a high thermal conductivity of > 160 W m(-1) degrees C-1. (c) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2967 / 2971
页数:5
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