Transparent flexible displays can be realized using active matrix organic light emitting device (AMOLED) with transparent electrodes on transparent plastic substrates. In this study, we developed low-temperature, high-performance [ZITO, ZnO : In2O3 : SnO2 = 3 : 1 : 1 molar ratio] thin-film transistors (TFTs) on polyarylate films. After optimizing the sputtering condition, the ZITO TFT with an ITO electrode had a high mobility of 16.93 cm(2) V-1 s(-1), and an SS of 0.39, while the ZITO TFT with a ZTO: B electrode showed no hysteresis on sweeping, a mobility of 2.29 cm(2) V-1 s(-1) and an SS of 0.18. (C) 2010 The Japan Society of Applied Physics