Reference survey spectra of elemental solid measured with Cr Kα photons as a tool for Quases analysis (5): Various elements (Mg, Sb, Bi, Se, Gd, Dy, Yb)

被引：4

作者：

Zborowski, C. ^{[1
,2
]}

Conard, T. ^{[1
]}

Vanleenhove, A. ^{[1
]}

Hoflijk, I. ^{[1
]}

Vaesen, I. ^{[1
]}

机构：

[1] Imec, MCACSA, Kapeldreef 75, B-3001 Leuven, Belgium

[2] Katholieke Univ Leuven, Inst Voor Kern & Stralingsfys, Celestijnenlaan 200D, B-3001 Leuven, Belgium

来源：

SURFACE SCIENCE SPECTRA | 2022年 / 29卷 / 02期

关键词：

INELASTIC BACKGROUND ANALYSIS; HAXPES; XPS; QUANTIFICATION;

D O I：

10.1116/6.0001956

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Several pure bulk materials were analyzed using laboratory-based hard x-ray photoelectron spectroscopy. The spectra are surveys measured using monochromatic Cr K-alpha radiation at 5414.8 eV after removal of surface contamination or oxidation. These aim to be references for inelastic background analysis using the Tougaard method. Published under an exclusive license by the AVS.

引用

收藏

页数：12

相关论文

共 15 条

[1]

[Anonymous], QUASES TOUGAARD SOFT

[2]

[Anonymous], SRDATA

[3]

[Anonymous], ASCII, DOI [10.1116/6.0001956, DOI 10.1116/6.0001956]

[4] Analysis of buried interfaces in multilayer device structures with hard XPS (HAXPES) using a CrKα source [J].

Renault, O. ;

Martinez, E. ;

Zborowski, C. ;

Mann, J. ;

Inoue, R. ;

Newman, J. ;

Watanabe, K. .

SURFACE AND INTERFACE ANALYSIS, 2018, 50 (11) :1158-1162

[5] Quantitative spectromicroscopy from inelastically scattered photoelectrons in the hard X-ray range [J].

Renault, O. ;

Zborowski, C. ;

Risterucci, P. ;

Wiemann, C. ;

Grenet, G. ;

Schneider, C. M. ;

Tougaard, S. .

APPLIED PHYSICS LETTERS, 2016, 109 (01)

[6] Effective inelastic scattering cross-sections for background analysis in HAXPES of deeply buried layers [J].

Risterucci, P. ;

Renault, O. ;

Zborowski, C. ;

Bertrand, D. ;

Torres, A. ;

Rueff, J. -P. ;

Ceolin, D. ;

Grenet, G. ;

Tougaard, S. .

APPLIED SURFACE SCIENCE, 2017, 402 :78-85

[7] Probing deeper by hard x-ray photoelectron spectroscopy [J].

Risterucci, P. ;

Renault, O. ;

Martinez, E. ;

Detlefs, B. ;

Delaye, V. ;

Zegenhagen, J. ;

Gaumer, C. ;

Grenet, G. ;

Tougaard, S. .

APPLIED PHYSICS LETTERS, 2014, 104 (05)

[8] Inelastic background analysis of HAXPES spectra: towards enhanced bulk sensitivity in photoemission [J].

Risterucci, Paul ;

Renault, Olivier ;

Martinez, Eugenie ;

Detlefs, Blanka ;

Zegenhagen, Jorg ;

Grenet, Genevieve ;

Tougaard, Sven .

SURFACE AND INTERFACE ANALYSIS, 2014, 46 (10-11) :906-910

[9] Inelastic background modelling applied to hard X-ray photoelectron spectroscopy of deeply buried layers: A comparison of synchrotron and lab-based (9.25 keV) measurements [J].

Spencer, B. F. ;

Maniyarasu, S. ;

Reed, B. P. ;

Cant, D. J. H. ;

Ahumada-Lazo, R. ;

Thomas, A. G. ;

Muryn, C. A. ;

Maschek, M. ;

Eriksson, S. K. ;

Wiell, T. ;

Lee, T-L ;

Tougaard, S. ;

Shard, A. G. ;

Flavell, W. R. .

APPLIED SURFACE SCIENCE, 2021, 541

[10]

Tougaard S, 1998, SURF INTERFACE ANAL, V26, P249, DOI 10.1002/(SICI)1096-9918(199804)26:4<249::AID-SIA368>3.0.CO