Finite Element Method and Genetic Algorithm for MEMS Analysis

被引：0

作者：

Chairez, J. I. ^{[1
]}

Ortiz, V. H. ^{[1
]}

机构：

[1] BIOCHIP BUBBLES Co, Ctr Negocios, Azcapotzalco, Mexico

来源：

NANOTECH CONFERENCE & EXPO 2009, VOL 3, TECHNICAL PROCEEDINGS: NANOTECHNOLOGY 2009: BIOFUELS, RENEWABLE ENERGY, COATINGS FLUIDICS AND COMPACT MODELING | 2009年

关键词：

Finite Element Method (FEM); Genetic Algorithms; MEMS; Optimization;

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

This paper presents an analysis of the finite element method (FEM) and genetic algorithms for the MEMS analysis and BIOMEMS design. The finite element method is the method used for the Computational analysis of mechanical structures in MEMS, BIOMEMS, among others. However, the FEM presents a major drawback: the generation of mesh does not meet any criterion optimization, which in turn prevents ensure the best possible reproduction of the structure to analyze. Genetic algorithms are a particularly robust computational method, which have demonstrated their ability to solve problems where optimization requires adjustment of a large number of parameters (multivariate) even when they are not competing performance indices (multiobjective). In addition, in order to improve the process, it call be a good way to educate mechanics computational applications in MEMS, and an example of this is used by the American company ARGOR (c).

引用

页码：335 / 338

页数：4