A Parylene MEMS Electrothermal Valve

被引：19

作者：

Li, Po-Ying ^{[1
]}

Givrad, Tina K. ^{[2
]}

Holschneider, Daniel P. ^{[3
,4
,5
,6
]}

Maarek, Jean-Michel I. ^{[2
]}

Meng, Ellis ^{[1
,2
]}

机构：

[1] Univ So Calif, Dept Elect Engn, Los Angeles, CA 90089 USA

[2] Univ So Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA

[3] Univ So Calif, Dept Psychiat & Behav Sci, Los Angeles, CA 90033 USA

[4] Univ So Calif, Dept Neurol, Los Angeles, CA 90033 USA

[5] Univ So Calif, Dept Cell & Neurobiol, Los Angeles, CA 90033 USA

[6] Univ So Calif, Dept Biomed Engn, Los Angeles, CA 90033 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2009年 / 18卷 / 06期

关键词：

Drug delivery; electrothermal valve; Parylene C; wireless operation; DRUG-DELIVERY; POWER;

D O I：

10.1109/JMEMS.2009.2031689

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The first microelectromechanical-system normally closed electrothermal valve constructed using Parylene C is described, which enables both low power (in milliwatts) and rapid operation (in milliseconds). This low-power valve is well suited for applications in wirelessly controlled implantable drug-delivery systems. The simple design was analyzed using both theory and modeling and then characterized in benchtop experiments. Operation in air (constant current) and water (current ramping) was demonstrated. Valve-opening powers of 22 mW in air and 33 mW in water were obtained. Following integration of the valve with catheters, our valve was applied in a wirelessly operated microbolus infusion pump, and the in vivo functionality for the appropriateness of use of this pump for future brain mapping applications in small animals was demonstrated.

引用

页码：1184 / 1197

页数：14

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