VACUUM ANNEALING EFFECT ON THE STRUCTURAL AND OPTICAL PROPERTIES OF ANTIMONY TRIOXIDE THIN FILMS

被引:0
|
作者
Tigau, N. [1 ]
Condurache-Bota, S. [1 ]
Drasovean, R. [1 ]
Cringanu, J. [1 ]
Gavrila, R. [2 ]
机构
[1] Dunarea de Jos Univ Galati, Fac Sci & Environm, 111 Domneasca St, Galati 800201, Romania
[2] Natl Inst Res & Dev Microtechnol IMT Bucharest, 126A Erou Iancu Nicolae St, Bucharest 077190, Romania
来源
ROMANIAN JOURNAL OF PHYSICS | 2017年 / 62卷 / 3-4期
关键词
Sb2O3; thin films; annealing effect; structural properties; optical properties; SUBSTRATE-TEMPERATURE; ELECTRICAL-PROPERTIES; HEAT-TREATMENT; OXIDE-FILMS; GROWTH; EVAPORATION; THICKNESS;
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Antimony trioxide (Sb2O3) thin films were deposited onto glass substrates held at 25 degrees C using the thermal vacuum evaporation technique. The films were annealed at 250 degrees C in vacuum after evaporation. The morpho-structural properties of the films were studied by X-ray daction (XRD) and atomic force microscopy (AFM), respectively. The optical properties were investigated for both the as-deposited and annealed film in the wavelength range of 190-1100 nm. The optical constants such as the refractive index, the absorption coefficient and the energy bandgap were determined from the transmission spectra, by using Swanepoel's method.
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页数:10
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