Multi sensor platform on plastic foil for environmental monitoring

被引：14

作者：

Courbat, J. ^{[1
]}

Briand, D. ^{[1
]}

Oprea, A. ^{[2
]}

Barsan, N. ^{[2
]}

Weimar, U. ^{[2
]}

de Rooij, N. F. ^{[1
]}

机构：

[1] EPFL, IMT Inst Microengn, SAMLAB, Rue Jaquet Droz 1,POB 526, CH-2002 Neuchatel, Switzerland

[2] Univ Tubingen, IPC, D-72076 Tubingen, Germany

来源：

PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期

关键词：

Integrted gas sensors; Plastic foil; Environmental monitoring; Temperature sensor; Humidity sensor; Polyimide; GAS SENSORS; TEMPERATURE; POLYIMIDE;

D O I：

10.1016/j.proche.2009.07.149

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report on multi-sensor platforms on plastic foils for environmental monitoring. Polymer-based capacitive sensors for humidity and volatile organic compounds (VOC)s, semiconducting metal oxides (MOX) based chemoresistive sensors for reducing/oxidizing gases and a Pt thermometer have been integrated together on a polyimide sheet and their performances characterized. The MOX gas sensors exhibited good sensitivity to CO and ethanol. The differential operation of the capacitive humidity sensors resulted in increased signals and reduced response/recovery times.

引用

页码：597 / +

页数：2

共 5 条

[1] Integration of MOX gas sensors on polyimide hotplates [J].

Briand, D. ;

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Courbat, J. ;

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de Rooij, N. F. .

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[2] Micro-hotplates on polyimide for sensors and actuators [J].

Briand, D. ;

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de Rooij, N. F. .

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[3] Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors [J].

Briand, D ;

Krauss, A ;

van der Schoot, B ;

Weimar, U ;

Barsan, N ;

Göpel, W ;

de Rooij, NF .

SENSORS AND ACTUATORS B-CHEMICAL, 2000, 68 (1-3) :223-233

[4]

Courbat J., 2009, TRANSD 2009 C DENV U, P584

[5] Temperature, humidity and gas sensors integrated on plastic foil for low power applications [J].

Oprea, A. ;

Courbat, J. ;

Barsan, N. ;

Briand, D. ;

de Rooij, N. F. ;

Weimar, U. .

SENSORS AND ACTUATORS B-CHEMICAL, 2009, 140 (01) :227-232

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