The progress and impact of semiconductor device and processing technology innovation in Japan

被引：0
作者：
Sugano, T [1 ]
机构：
[1] Univ Tokyo, Dept Elect & Elect Engn, Tokyo 112, Japan
来源：
PROCEEDINGS OF THE IEEE | 1998年 / 86卷 / 01期
关键词：
bipolar transistors; integrated circuits; MOSFET's; process control; semiconductor devices; silicon materials/devices; transistors; very large scale integration;
D O I：
10.1109/5.658765
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper is an overview of the progress of the semiconductor devices and processing technologies innovated in Japanese industry and/or academia for the past 50 years and their impact on the advancement of electronics and the fulfillment of technical and social needs. This paper gives an overview of 1) a government initiative research project, 2) strategic research efforts in industry, 3) academia-government-industry collaboration, and 4) recent topics of semiconductor device and technology innovation.
引用
收藏
页码：138 / 149
页数：12
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