Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides

被引：321

作者：

Van Laere, Frederik ^{[1
]}

Roelkens, Guenther

Ayre, Melanie

Schrauwen, Jonathan

Taillaert, Dirk

Van Thourhout, Dries

Krauss, Thomas E.

Baets, Roe

机构：

[1] Univ Ghent, IMEC, Dept Informat Technol INTEC, B-9000 Ghent, Belgium

[2] Univ St Andrews, Dept Math & Computat Sci, Sch Phys & Astron, St Andrews KY16 9SS, Fife, Scotland

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2007年 / 25卷 / 01期

关键词：

BenzoCycloButene (BCB) wafer bonding; gold mirror; grating couplers; integrated optics; MEMBRANE;

D O I：

10.1109/JLT.2006.888164

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present high-efficiency grating couplers for coupling between a single-mode fiber and nanophotonic waveguides, fabricated both in silicon-on-insulator (SOI) and InP membranes using BenzoCycloButene wafer bonding. The coupling efficiency is substantially increased by adding a gold bottom mirror to the structures. The measured coupling efficiency to fiber is 69% for SOI grating couplers and 56% for bonded InP membrane grating couplers.

引用

页码：151 / 156

页数：6

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