The effects of aluminium composition on the mechanical properties of reactivity sputtered TiAlN films

被引：44

作者：

Lii, DF ^{[1
]}

机构：

[1] Chinese Naval Acad, Dept Elect Engn, Kaohsiung 813, Taiwan

来源：

JOURNAL OF MATERIALS SCIENCE | 1998年 / 33卷 / 08期

关键词：

D O I：

10.1023/A:1004327421261

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

TiAlN films were deposited on tool materials through an r.f. bias reactive sputtering process. The effects of the aluminium composition in the films on the hardness, oxidation resistance and wear properties were studied. The results indicated that both the aluminium composition and cutting speed had substantial effects on wear resistance. The oxide phases formed at elevated cutting temperatures, especially alumina, had important effects on the cutting performance. An optimum improvement of nine times in wear resistance compared to uncoated tools, was observed. (C) 1998 Chapman & Hall.

引用

页码：2137 / 2145

页数：9

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