Ultimate sized namo-dots formed by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

被引：45
|
作者：
Tanaka, M [1 ]
Shimojo, M
Han, M
Mitsuishi, K
Furuya, K
机构：
[1] Natl Inst Mat Sci, Electron Microscopy Stn Sakura, Tsukuba, Ibaraki 3050003, Japan
[2] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
来源：
SURFACE AND INTERFACE ANALYSIS | 2005年 / 37卷 / 02期
关键词：
electron beam; induced deposition (EBID); namo-dot; TEM; STEM; W(CO)(6);
D O I：
10.1002/sia.1978
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
We have successfully fabricated namo-dots containing tungsten or gold from metal-organic gas sources by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size fabricated from W(CO)(6) is similar to1.5 nm in diameter, which is close to the theoretical resolution limit. Copyright (C) 2005 John Wiley Sons, Ltd.
引用
收藏
页码：261 / 264
页数：4
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