Holographic Femtosecond Laser Parallel Processing Method Based on the Fractional Fourier Transform

被引：19

作者：

Wang, Jin ^{[1
,2
]}

Sun, Shufeng ^{[1
]}

Zhang, Honghao ^{[2
]}

Hasegawa, Satoshi ^{[2
]}

Wang, Pingping ^{[1
]}

Hayasaki, Yoshio ^{[2
]}

机构：

[1] Qingdao Univ Technol, Collaborat Innovat Ctr Green Intelligent Laser Mf, Qingdao 266525, Peoples R China

[2] Utsunomiya Univ, Ctr Opt Res & Educ CORE, 7-1-2 Yoto, Utsunomiya, Tochigi 3218585, Japan

来源：

OPTICS AND LASERS IN ENGINEERING | 2021年 / 146卷

基金：

中国国家自然科学基金;

关键词：

Holographic laser processing; Fractional Fourier transform; Fractional order; Zero order spot; Parallel beam; PHASE; ROTATION; DESIGN; IMAGE; FABRICATION; ARRAY;

D O I：

10.1016/j.optlaseng.2021.106704

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel holographic femtosecond laser parallel processing method based on the fractional Fourier transform is proposed, which increases the flexibility of the processing position of the parallel beam as well as the available space in the paraxial area. Computer-generated holograms are produced by combining the fractional Fourier transform and an iterative algorithm with excellent uniformity and diffraction efficiency. Parallel processing can be implemented for complex microstructures by adjusting the femtosecond laser beam using a spatial light modulator. The zero-order beam spot can be actively defocused by changing the fractional order method or exploited to fabricate various structures to improve laser energy utilization.

引用

页数：7

共 43 条

[1]

Arrigoni M., 2019, PhotonicsViews, V16, P78, DOI [10.1002/phvs.201900022, DOI 10.1002/PHVS.201900022]

[2] KINOFORM DESIGN WITH AN OPTIMAL-ROTATION-ANGLE METHOD [J].

BENGTSSON, J .

APPLIED OPTICS, 1994, 33 (29) :6879-6884

[3] Holographic image projection using fractional Fourier transformation [J].

Chang, Chenliang ;

Xia, Jun ;

Lei, Wei .

OPTICS COMMUNICATIONS, 2012, 285 (01) :24-28

[4]

Dammann H., 1971, Optics Communications, V3, P312, DOI 10.1016/0030-4018(71)90095-2

[5] Computer generation of optimal holograms for optical trap arrays [J].

Di Leonardo, Roberto ;

Ianni, Francesca ;

Ruocco, Giancarlo .

OPTICS EXPRESS, 2007, 15 (04) :1913-1922

[6]

GERCHBERG RW, 1972, OPTIK, V35, P237

[7] Holographic femtosecond laser processing with multiplexed phase fresnel lenses displayed on a liquid crystal spatial light modulator [J].

Hasegawa, Satoshi ;

Hayasaki, Yoshio .

OPTICAL REVIEW, 2007, 14 (04) :208-213

[8] Holographic femtosecond laser processing with multiplexed phase Fresnel lenses [J].

Hasegawa, Satoshi ;

Hayasaki, Yoshio ;

Nishida, Nobuo .

OPTICS LETTERS, 2006, 31 (11) :1705-1707

[9] Variable holographic femtosecond laser processing by use of a spatial light modulator [J].

Hayasaki, Y ;

Sugimoto, T ;

Takita, A ;

Nishida, N .

APPLIED PHYSICS LETTERS, 2005, 87 (03)

[10] Optimization methods of hologram for holographic femtosecond laser processing [J].

Hayasaki, Yoshio ;

Hasegawa, Satoshi .

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XVI, 2011, 7920

← 1 2 3 4 5 →