High-temperature oxidation of films based on aluminum nitride

被引：0
|
作者：
Andrievskii, RA [1 ]
Lavrenko, VA
Desmaison, J
Desmaison-Brut, M
Kalinnikov, GV
Panasyuk, AD
机构：
[1] Russian Acad Sci, Inst Problems Chem Phys, Chernogolovka 142432, Moscow Oblast, Russia
[2] Natl Acad Sci Ukraine, Inst Problems Mat Sci, Kiev, Ukraine
[3] Univ Limoges, Limoges, France
来源：
DOKLADY PHYSICAL CHEMISTRY | 2000年 / 373卷 / 1-3期
关键词：
D O I：
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中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：99 / 101
页数：3
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