Effect of energy density and feeding speed on micro-hole drilling in C/SiC composites by picosecond laser

被引：84

作者：

Liu, Yongsheng ^{[1
]}

Wang, Chunhui ^{[1
]}

Li, Weinan ^{[2
]}

Zhang, Litong ^{[1
]}

Yang, Xiaojun ^{[2
]}

Cheng, Guanghua ^{[2
]}

Zhang, Qing ^{[1
]}

机构：

[1] Northwestern Polytech Univ, Sci & Technol Thermostruct Composite Mat Lab, Xian 710072, Shaanxi, Peoples R China

[2] Chinese Acad Sci, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt & Photon, Xian 10068, Shaanxi, Peoples R China

来源：

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY | 2014年 / 214卷 / 12期

关键词：

Ceramic-matrix composites; Scanning electron microscopy (SEM); X-ray photoelectron spectroscopy (XPS); Laser processing; ABLATION; FEMTOSECOND; ENGINES; PLASMA; CMCS;

D O I：

10.1016/j.jmatprotec.2014.07.016

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of energy density and feeding speed on micro-holes was investigated, which were machined in C/SiC composites by picosecond laser. Morphologies and elemental compositions of the machined holes in 2 mm and 3 mm thickness specimens were analyzed. The results indicated that both energy density and feeding speed had remarkable effect on the quality of micro-holes, especially on the exit side and cross-section of micro-holes. While the circularity of drilling holes on the entry side was affected by the energy density and feeding speed slightly. Additionally, the machining debris also played an important role in the quality of micro-holes. The micro-holes were consisted with three elements C, Si, and O, and those predominantly attributed to C-C (sp(2)), C-C (sp(3)) and Si-O bonds. Moreover, the laser machining process was discussed, which was responsible for the formation of the debris. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：3131 / 3140

页数：10

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