High-speed simultaneous measurement of refractive index and thickness of transparent plates by low-coherence interferometry and confocal optics

被引：32
|
作者：
Ohmi, M
Nishi, H
Konishi, Y
Yamada, Y
Haruna, M
机构：
[1] Osaka Univ, Grad Sch Med, Course Allied Hlth Sci, Suita, Osaka 5650871, Japan
[2] Osaka Inst Technol, Dept Elect Engn, Osaka 5658585, Japan
[3] NEOARK Corp, Tokyo 1920015, Japan
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 2004年 / 15卷 / 08期
关键词：
low coherence interferometry; coherence gate; confocal optics; simultaneous measurement of refractive index and thickness; high-speed measurement;
D O I：
10.1088/0957-0233/15/8/017
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We propose and demonstrate a novel measurement technique for determination of n and t, where the measurement time is only 1 s or less for a thickness of <1 mm. Such a high-speed measurement is successfully achieved by simultaneous detection of coherence-gate and confocal signals with a single scanning of the sample. A measurement accuracy of 0.3% or less was successfully attained for a thickness of <1 mm. A multi-point measurement result is also presented for the index and thickness distributions of a radial-graded-index rod lens.
引用
收藏
页码：1531 / 1535
页数：5
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