Measuring the complex permittivity of dielectric films by means of open resonator technique

被引：0

作者：

Hu, LL ^{[1
]}

Wang, SJ ^{[1
]}

Xu, DM ^{[1
]}

机构：

[1] Shanghai Univ, Sch Commun & Informat Engn, Shanghai 201800, Peoples R China

来源：

ICEMI '97 - CONFERENCE PROCEEDINGS: THIRD INTERNATIONAL CONFERENCE ON ELECTRONIC MEASUREMENT & INSTRUMENTS | 1997年

关键词：

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A method for measuring the complex permittivity of dielectric films using open resonator technique is proposed. The films under test are multi-folded and a prior known heavy specimen is placed on the films to eliminate the air gaps and flatten the films. A measurement system was set up in accordance with the National Standard GB9534-88. The length-varying method was used in measuring Q-factors of the empty and the loaded resonator. The experimental results of two kinds of film have testified the validity of the method.

引用

页码：514 / 517

页数：2

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