Vibration energy harvesting using highly (001)-oriented Pb(Zr, Ti)O3 thin film

被引：36

作者：

Harigai, Takakiyo ^{[1
]}

Adachi, Hideaki ^{[1
]}

Fujii, Eiji ^{[1
]}

机构：

[1] Panasonic Corp, Adv Technol Res Labs, Seika, Kyoto 6190237, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 2010年 / 107卷 / 09期

关键词：

MEMS; MICROSYSTEMS;

D O I：

10.1063/1.3406253

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Energy conversion from mechanical vibration into electric power was investigated using the piezoelectric Pb(Zr, Ti)O(3) lead zirconate titanate (PZT) thin film with highly (001)-orientation. The piezoelectric d(31) constant was found to be as large as -150 pC/N. The generated electric voltage under vibration acceleration of 45 m/s(2) at 2450 Hz for the PZT/Si cantilever exceeded 2 V and the operation of light emitting diode lighting was demonstrated. The average output power of 100 mu W was obtained at the impedance-matched load resistance of 2.2 k Omega. The generated power density of 50 mu W/mm(3) was much larger than that of conventional piezoelectric harvesters. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3406253]

引用

页数：3

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