Synthesis of micro- or nano-crystalline diamond films on WC-Co substrates with various pretreatments by hot filament chemical vapor deposition

被引:116
|
作者
Wei, Qiu-ping [1 ,2 ,3 ]
Yu, Z. M. [1 ]
Ashfold, Michael N. R. [2 ]
Ye, J. [1 ]
Ma, L. [3 ]
机构
[1] Cent S Univ, Sch Mat Sci & Engn, Changsha 410083, Peoples R China
[2] Univ Bristol, Sch Chem, Bristol BS8 1TS, Avon, England
[3] Cent S Univ, State Key Lab Powder Met, Changsha 410083, Peoples R China
关键词
HFCVD; Nano-crystalline diamond film; Cemented carbide; Substrate pretreatment; CVD DIAMOND; HF-CVD; ADHESION; COBALT; INTERLAYERS; DIFFUSION; GROWTH; PERFORMANCE; COATINGS; TITANIUM;
D O I
10.1016/j.apsusc.2010.02.031
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Diamond films deposited on tungsten carbide can lead to major improvements in the life and performance of cutting tools. However, deposition of diamond onto cemented tungsten carbide (WC-Co) is problematic due to the cobalt binder in the WC. This binder provides additional toughness to the tool but results in poor adhesion and low nucleation density of any diamond film. A two-step chemical etching pretreatment (Murakami reagent and Caro acid, (MC)-pretreatment) and a boronization pretreatment have both been used extensively to improve adhesion of CVD diamond film on WC-Co substrates. Here we discuss the applicability of MC-pretreatment for a range of Co-containing WC-Co substrates, and demonstrate a controlled synthesis process based on liquid boronizing pretreatment for obtaining smooth and dense micro-or nano-crystalline diamond films on high Co-containing WC-Co substrates. Substrate treatments and deposition parameters were found to have major influences on the smoothness, structure and quality of the diamond films. The best quality diamond films were achieved under conditions of relatively high substrate temperature (T-s) and the best adhesion was achieved at T-s = 800 degrees C. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:4357 / 4364
页数:8
相关论文
共 50 条
  • [31] Effect of nitrogen on deposition and field emission properties of boron-doped micro- and nano-crystalline diamond films
    L. A. Li
    S. H. Cheng
    H. D. Li
    Q. Yu
    J. W. Liu
    X. Y. Lv
    Nano-Micro Letters, 2010, 2 : 154 - 159
  • [32] Effect of Gas Sources on the Deposition of Nano-Crystalline Diamond Films Prepared by Microwave Plasma Enhanced Chemical Vapor Deposition
    Weng Jun
    Xiong Liwei
    Wang Jianhua
    Man Weidong
    Chen Guanhu
    PLASMA SCIENCE & TECHNOLOGY, 2010, 12 (06) : 761 - 764
  • [33] Effect of Gas Sources on the Deposition of Nano-Crystalline Diamond Films Prepared by Microwave Plasma Enhanced Chemical Vapor Deposition
    翁俊
    熊礼威
    汪建华
    满卫东
    陈冠虎
    Plasma Science and Technology, 2010, (06) : 761 - 764
  • [34] Effect of Gas Sources on the Deposition of Nano-Crystalline Diamond Films Prepared by Microwave Plasma Enhanced Chemical Vapor Deposition
    翁俊
    熊礼威
    汪建华
    满卫东
    陈冠虎
    Plasma Science and Technology, 2010, 12 (06) : 761 - 764
  • [36] Doping of vanadium to nanocrystalline diamond films by hot filament chemical vapor deposition
    Zhang, Yaozhong
    Zhang, Liying
    Zhao, Jiang
    Wang, Liang
    Zhao, Gang
    Zhang, Yafei
    NANOSCALE RESEARCH LETTERS, 2012, 7
  • [37] Doping of vanadium to nanocrystalline diamond films by hot filament chemical vapor deposition
    Yaozhong Zhang
    Liying Zhang
    Jiang Zhao
    Liang Wang
    Gang Zhao
    Yafei Zhang
    Nanoscale Research Letters, 7
  • [38] Synthesis of nanocrystalline diamond films on smooth WC-Co cemented carbide substrates
    Sun, F. H.
    Zhang, Z. M.
    Ma, Y. P.
    Chen, M.
    ADVANCES IN ABRASIVE MACHINING AND SURFACING TECHNOLOGIES, PROCEEDINGS, 2006, : 681 - +
  • [39] Critical parameters in hot filament chemical vapor deposition of diamond films on tool steel substrates with CrN interlayers
    Gowri, M.
    Li, H.
    Kacsich, T.
    Schermer, J. J.
    van Enckevort, W. J. P.
    ter Meulen, J. J.
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (08): : 4601 - 4608
  • [40] Hot filament chemical vapor deposition temperature field optimization for diamond films deposited on silicon nitride substrates
    Wu, Yuhou
    Zhang, Huisen
    Yan, Guangyu
    Liu, Lusheng
    Cristea, Daniel
    Wang, He
    Yang, Yumiao
    Shen, Jianhui
    MATERIALS RESEARCH EXPRESS, 2021, 8 (11)