Synthesis of micro- or nano-crystalline diamond films on WC-Co substrates with various pretreatments by hot filament chemical vapor deposition

被引:116
|
作者
Wei, Qiu-ping [1 ,2 ,3 ]
Yu, Z. M. [1 ]
Ashfold, Michael N. R. [2 ]
Ye, J. [1 ]
Ma, L. [3 ]
机构
[1] Cent S Univ, Sch Mat Sci & Engn, Changsha 410083, Peoples R China
[2] Univ Bristol, Sch Chem, Bristol BS8 1TS, Avon, England
[3] Cent S Univ, State Key Lab Powder Met, Changsha 410083, Peoples R China
关键词
HFCVD; Nano-crystalline diamond film; Cemented carbide; Substrate pretreatment; CVD DIAMOND; HF-CVD; ADHESION; COBALT; INTERLAYERS; DIFFUSION; GROWTH; PERFORMANCE; COATINGS; TITANIUM;
D O I
10.1016/j.apsusc.2010.02.031
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Diamond films deposited on tungsten carbide can lead to major improvements in the life and performance of cutting tools. However, deposition of diamond onto cemented tungsten carbide (WC-Co) is problematic due to the cobalt binder in the WC. This binder provides additional toughness to the tool but results in poor adhesion and low nucleation density of any diamond film. A two-step chemical etching pretreatment (Murakami reagent and Caro acid, (MC)-pretreatment) and a boronization pretreatment have both been used extensively to improve adhesion of CVD diamond film on WC-Co substrates. Here we discuss the applicability of MC-pretreatment for a range of Co-containing WC-Co substrates, and demonstrate a controlled synthesis process based on liquid boronizing pretreatment for obtaining smooth and dense micro-or nano-crystalline diamond films on high Co-containing WC-Co substrates. Substrate treatments and deposition parameters were found to have major influences on the smoothness, structure and quality of the diamond films. The best quality diamond films were achieved under conditions of relatively high substrate temperature (T-s) and the best adhesion was achieved at T-s = 800 degrees C. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:4357 / 4364
页数:8
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