Strong emission of particulates towards the incident beam direction in pulsed-laser ablation experiments

被引:14
|
作者
Cultrera, Luca [1 ]
Zeifman, Michael I.
Perrone, Alessio
机构
[1] Natl Lab Frascati, Natl Inst Nucl Phys, Frascati, Italy
[2] Penn State Univ, Dept Aerosp Engn, University Pk, PA 16802 USA
[3] Univ Lecce, Dept Phys, I-73100 Lecce, Italy
[4] Natl Inst Nucl Phys, I-73100 Lecce, Italy
关键词
silcon; pulsed laser deposition; particulates; plume deflection; mass distribution;
D O I
10.1016/j.apsusc.2007.01.049
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Theoretical predictions suggested that particulates (large clusters and droplets) in pulsed-laser ablation deposition (PLD) move towards the surface normal and constitute a small fraction of the total plume mass. Contrary to expectations, here we report that, independently of the laser beam direction, large clusters are ejected towards the laser direction of incidence, which generally differs from the surface normal. Moreover, fragments and droplets constitute the major fraction of the ablated mass. Cross-sectional SEM investigations performed on the Si targets show that the direction of growth of the columns follows the laser beam direction. These observations have been explained by the change of the microscopic ablation mechanism from monomer evaporation at low local laser fluences to phase explosion at higher local fluences. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:6322 / 6325
页数:4
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